Zeiss SMT expands capacity in Oberkochen and key semiconductor markets
Zeiss Semiconductor Manufacturing Technology has reached a milestone in its Oberkochen site expansion with the move-in to a new office building in July 2026, roughly four years after the groundbreaking ceremony in May 2022. In total, the expansion adds approximately 25,000 square metres of space for production and production-related areas at the site.
The Oberkochen expansion is part of a broader capacity investment strategy spanning multiple German and international locations. In Wetzlar, a new multifunctional factory is currently under construction. The R&D site in Roßdorf was expanded by 300 square metres of cleanroom space in autumn 2025. In Jena, work on the high-tech site is continuing, with the Semiconductor Mask Solutions business unit set to move into new space there, according to a press release from Zeiss.
Internationally, Zeiss SMT opened a new Innovation Centre in Korea in July 2026 and added a training centre in Shanghai and logistics infrastructure in the United States and Germany.
The investments target key technology areas for next-generation chip manufacturing, including high-precision optics for High-NA EUV lithography, photomask production and repair, wafer fab inspection and metrology, and advanced packaging solutions.
“With the site expansion in Oberkochen and at our international locations, we are investing proactively in the future of the semiconductor industry,” says Dr. Frank Rohmund, President and Chief Executive Officer of ZEISS SMT. “As part of this highly complex and investment-intensive ecosystem, we are taking responsibility and laying the groundwork for innovation, reliability, scalability and speed.”
