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SMT & Inspection | February 28, 2006

Obducat nano-imprint heading<br>for mass production

Obducat has now showed its next-generation nano-imprint lithography machine for mass production.

The system from Sweden based Obducat can handle resolutions of 30 nm and below with a 200-mm tool. According to the company the machine has a throughput of 30 wafers an hour.
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August 21 2019 3:49 pm V14.1.4-1