SMT & Inspection | December 04, 2006
JPSA Introduces High-Precision Z-theta Motorized Rotary Stage
A new integrated Z-theta motorized stage from J. P. Sercel Associates (JPSA) offers high precision operation for wafer processing and positioning.
Its non-contact operation – as opposed to typical worm and wheel rotary designs - reduces maintenance requirements, is less susceptible to wear, and is not affected by torque variations because there's no gear interface. The new Z-theta stage provides 360 degrees of rotational capability, and its Z-axis capability makes it applicable to a wide range of applications, with the ability to accommodate wafers of varying thicknesses and diameters. Advantages of the new rotary stage include continuous or limited travel, excellent accuracy and repeatability, a cog-free motor for smooth motion; zero gear backlash; low wobble and bearing run-out; and no accuracy changes over time due to gear wear. The stage is ideal for laser micromachining applications and wafer processing, among others. Resolution (microns/arc seconds) is 0.25µm in the Z axis, and 0.72 arc seconds in the Theta axis; Repeatability of ±2 µm in the Z axis, and ±1 arc second for Theta.