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© RAVE LLC General | April 03, 2019

Bruker folds RAVE LLC into semiconductor metrology division

Bruker Corporation has purchased semiconductor mask repair and cleaning business of RAVE LLC, a provider of nanomachining and laser photomask repair equipment, for an undisclosed amount.

The business, which is now part of Bruker's semiconductor metrology division, will continue to be operated in Delray Beach, Florida, according to a company press release, and is expected to reinforce Bruker's position in automated atomic force microscopy (AFM) for semiconductor photomask and wafer metrology. The combined offering is designed to enable solutions for nanomachining mask repair and cleaning, as well as metrology for advanced nodes for EUV and multi-patterning lithography. RAVE CEO Barry Hopkins said, "The control of pattern defects is the most critical issue for production of high-end photomasks with decreasing feature size and increasing mask complexity. Our new nm-VI photomask repair system is our sixth generation of high-precision nanomachining technology utilizing the advantages of AFM to repair masks for 10 and 7 nm nodes. We are excited to now be able to take advantage of Bruker's unrivalled AFM expertise and global sales and service reach to take the next step in supporting the semiconductor industry's technology roadmap." RAVE LLC is a global supplier of advanced process solutions to the semiconductor and photomask industries. The company is headquartered in Delray Beach, Florida, and maintains sales and service offices in Asia, Europe and the USA. Bruker Corporation is a manufacturer of scientific instruments for molecular and materials research and industrial analysis. The company is based in Billerica, Massachusetts and has more than 6,000 employees spanning seven continents worldwide.
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September 20 2019 5:48 pm V14.4.1-1