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© ASML Business | January 19, 2022

Intel and ASML strengthen their collaboration

Intel has made its first purchase order for ASML’s TWINSCAN EXE:5200 system, marking the next step on the path to EUV 0.55 NA (High-NA) introduction.

Intel has issued its first purchase order to ASML for the delivery of the industry’s first TWINSCAN EXE:5200 system – an extreme ultraviolet (EUV) high-volume production system with a high numerical aperture and more than 200 wafers per hour productivity.

“Intel’s vision and early commitment to ASML’s High-NA EUV technology is proof of its relentless pursuit of Moore’s Law. Compared to the current EUV systems, our innovative extended EUV roadmap delivers continued lithographic improvements at reduced complexity, cost, cycle time and energy that the chip industry needs to drive affordable scaling well into the next decade,” says ASML President and CTO Martin van den Brink in a press release.

The US chipmaker was the company first to purchase the earlier TWINSCAN EXE:5000 system back in 2018, and with this new purchase, the collaboration continues the path for Intel’s production manufacturing with High-NA EUV beginning in 2025.

“Intel’s focus is to stay at the forefront of semiconductor lithography technology and we’ve been building our EUV expertise and capacity over the last year. Working closely with ASML, we will harness High-NA EUV’s high-resolution patterning as one of the ways we continue Moore’s Law and maintain our strong history of progression down to the smallest of geometries,” says Dr. Ann Kelleher, executive vice president and general manager of Technology Development at Intel.

At the 2021 Investor Day, ASML shared its EUV roadmap and indicated that High-NA technology is expected to start supporting production manufacturing in 2025.

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May 24 2022 12:51 pm V20.5.24-2