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© norebbo dreamstime.com Components | June 24, 2015

Bosch and new inspection systems

MEMS company Robert Bosch GmbH has selected Rudolph Technologies to supply several different configurations of its F30 Inspection System for various steps in the front- and back-end fabrication processes of micro electrical mechanical systems (MEMS) devices.
This win represents increasing business with tools beginning to ship in the second quarter 2015 for Rudolph.

The MEMS industry is expanding, according to Yole Développement, and Bosch has experienced noteworthy growth in the past years. Zero defects is critical for the MEMS application of automotive sensors. The F30 system’s high speed and high sensitivity give the ability to free up expensive micro tools and focus on throughput and sampling inspection.

“A critical deciding factor for Bosch was the fact that Rudolph goes beyond traditional inspection by not only detecting defects but automatically classifying data so customers can quickly eliminate the source of the defect,” Goodrich added. “Our integrated software solutions will help Bosch meet the stringent automotive quality standards by enabling full characterization of the inspection data, resulting in high productivity and demonstrable quality.”

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