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Electronics Production | June 30, 2009

Europe makes strides on sustainable Semiconductor Manufacturing

Linde Gases, a division of The Linde Group, has installed Europe’s first CE-marked on-site electronics grade fluorine generator at STMicroelectronics’ Crolles wafer fabrication plant in France.
As part of STMicroelectronics’ initiative to lower the environmental impact of producing semiconductors, high-pressure cylinder F2 has been replaced by two new Linde Generation-F on-site fluorine generators.

“As operators of thermal CVD furnaces look to optimize costs and minimize risk through stricter safety requirements, Linde is seeing a quicker pace of adoption for on-site generated fluorine,” said Greg Shuttleworth, Semiconductor Product Manager for Linde Gases Division. “We are also seeing increasing interest in using F2 as an alternative to NF3 for the cleaning of Plasma-Enhanced CVD chambers due to concerns over the very high global warming potential of NF3 and imminent legislation that could restrict its use.”

“The installation of Europe’s first on-site fluorine generators at our Crolles wafer fabrication plant is testament to STMicroelectronics’ commitment to increasing safety and improving our eco-footprint,” said David Ferrand, Director of Facilities at the Crolles 200 and Crolles 300 fabs. “We have directly reduced our carbon footprint at Crolles 300mm by eliminating cylinder deliveries. We are excited by the potential for even greater environmental efficiency by using the generation capacity in other cleaning applications.”

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