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© aydindurdu dreamstime.com Electronics Production | September 14, 2016

Memory manufacturer qualifies Aixtron’s QXP-8300 mini-batch ALD system

A major memory manufacturer has qualified Aixtron SE's QXP-8300 Atomic Layer Deposition (ALD) mini-batch system suitable for high-k oxide films in various advanced memory applications including 3D structure devices.
“We are delighted that our customer has completed the evaluation of our QXP-8300 ALD system for the manufacturing of the most advanced high performance memory devices. The QXP-8300 ALD system enables the manufacturing of advanced films with excellent electrical and device properties. AIXTRON is looking forward to further support its customer’s memory development plans by providing the production equipment to address the challenges of a rapidly evolving industry,” says Bill Bentinck, Vice President and General Manager of AIXTRON Inc., USA.

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