Electronics Production |
ASML wins legal victory over Ultratech
Dutch photolithography specialist ASML Holding B.V. has won a legal victory by a US federal district court jury.
The jury found that a patent held by Ultratech Inc. was invalid and that ASML was not liable for infringement, according to law firm, which represented ASML during the trial.
San Jose-based Ultratech originally filed suit in May 2000, charging infringement against a host of photolithography equipment makers, including Nikon and Canon. Both Nikon and Canon chose to settle and entered into licensing agreements with Ultratech. ASML's defense was that step-and-scan systems represented prior art and therefore could not infringe.
